Carmanhaas itanga sisitemu yumwuga ya laser optique hamwe na galvo scan ya laser itunganijwe. Sisitemu yose ni module ikora itandukanye ituma gucomeka no gukina. Gutunganyirizwa hamwe na skaneri ya galvanometero, cyane cyane harimo: QBH yo gukusanya module / kwagura urumuri, sisitemu ya galvanometero, lens ya F-theta scan, aho QBH yo gukusanya module / kwagura urumuri imenya ishusho yumucyo
isoko (gutandukanya parallel cyangwa umwanya muto bihinduka umwanya munini), sisitemu ya galvanometero imenya urumuri.
(1) Ibikoresho ni File silika;
(2) Kwangirika kwinshi kurenza urugero (ibyangiritse: 40 J / cm2, 10 ns);
Kwinjiza ibishishwa <20 ppm. Menya neza ko lens ya scan ishobora kuzura kuri 8KW;
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(5) Hamwe nigishushanyo kitari ubushyuhe, drift yibanze ni <0.5mm kuri 80 ° C;
(6) Urutonde rwuzuye rwibisobanuro, abakiriya barashobora gutegurwa.
1030-1090nm F-Theta Lens
| Igice Ibisobanuro | Uburebure bwibanze (mm) | Gusikana Umwanya (mm) | Kwinjira cyane Umunyeshuri (mm) | Intera y'akazi (mm) | Kuzamuka Urudodo |
| SL-1064-100-170- (14CA) | 170 | 100x100 | 14 | 215 | M79x1 / M102x1 |
| SL- (1030-1090) -150-210- (15CA) | 210 | 150x150 | 15 | 269 | M79x1 / M102x1 |
| SL- (1030-1090) -175-254- (15CA) | 254 | 175x175 | 15 | 317 | M79x1 / M102x1 |
| SL- (1030-1090) -90-175- (20CA) | 175 | 90x90 | 20 | 233 | M85x1 |
| SL- (1030-1090) -160-260- (20CA) | 260 | 160x160 | 20 | 333 | M85x1 |
| SL- (1030-1090) -100-254- (30CA) -M102 * 1-WC | 254 | 100x100 | 30 | 333 | M102x1 / M85x1 |
| SL- (1030-1090) -180-348- (30CA) -M102 * 1-WC | 348 | 180x180 | 30 | 438 | M102x1 |
| SL- (1030-1090) -180-400- (30CA) -M102 * 1-WC | 400 | 180x180 | 30 | 501 | M102x1 |
| SL- (1030-1090) -250-500- (30CA) -M112 * 1-WC | 500 | 250x250 | 30 | 607 | M112x1 / M100x1 |
QBH Gukusanya Module
| Igice Ibisobanuro | Uburebure bwibanze (mm) | Gusiba neza (mm) | Max NA | Igipfukisho |
| CL2- (900-1100) -30-F60-QBH-A-WC | 60 | 28 | 0.22 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -30-F100-QBH-A-WC | 100 | 28 | 0.13 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -30-F125-QBH-A-WC | 125 | 28 | 0.10 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -38-F100-QBH-A-WC | 100 | 34 | 0.16 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -38-F125-QBH-A-WC | 125 | 34 | 0.13 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -38-F135-QBH-A-WC | 135 | 34 | 0.12 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -38-F150-QBH-A-WC | 150 | 34 | 0.11 | AR / AR @ 1030-1090nm |
| CL2- (900-1100) -38-F200-QBH-A-WC | 200 | 34 | 0.08 | AR / AR @ 1030-1090nm |
